VISION FOR MICRO- ANDNANOMANUFACTURING

January 2008

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EDITORS

Svetan Ratchev (University of Nottingham)

Michele Turitto (University of Nottingham)

EDITORIAL BOARD

Stefan Dimov (Cardiff University)

Bertrand Fillon (CEA)

Markus Dickerhof (FZK Karlsruhe)

Wolfgang Schäfer (IPA)

Andrea Reinhardt (MicroTEC)

Christian Wögerer (Profactor R&S GmbH)

Ana Almansa (Profactor R&S GmbH)

Pieter Bolt (TNO)

CONTRIBUTORS

Patric Salomon (4M2C – enabling MNT)Ruediger Iden (BASF)Bernard Peat (Cardiff University)Samuel Bigot (Cardiff University)Ian Belding (Carl Zeiss SMT Ltd)Peter Gnauck (Carl Zeiss NTS GmbH)Pierre Juliet (CEA)Paul Kirby (Cranfield University)Nello Li Pira (CRF)Vito Guido Lambertini (CRF)Sergio Durante (DIAD)Henne van Heeren (enabling MNT)Igor Movchan (ENISE)Igor Smurov (ENISE)Marc Desmulliez (Heriot Watt University)Joseba Perez Bilbatua (Ideko)Tim Hösel (IMTEK)Andreas Schoth (IMTEK)Claas Müller (IMTEK)Holger Reinecke (IMTEK)Per Johander (IVF)Bernt Thorstensen (KeraNor AS)David Williams (Loughborough University)Arantxa Renteria (Robotiker - Tecnalia)Manfred Diehl (UMICORE)Peter Rigby (UMICORE)Ulf Engel (University of Erlangen-Nuremberg)Alexander Tsouknidas (University of Thessaloniki)Sabine Globisch (VDIVDE-IT)

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EXECUTIVE SUMMARY

The micro- and nanomanufacturing vision summarises key points from the strategic research agenda(SRA) of the European Micro- and Nanomanufacturing technology platform MINAM. The MINAMplatform has been created to support the European manufacturers and equipment-suppliers in the fieldof manufacturing micro- and nanotechnology products in establishing and maintaining a worldwideleadership in key technology areas. The establishment of the MINAM platform has been facilitated bythe coordinated actions projects µ-Sapient and IPMMAN and the Network of Excellence 4M allfunded by the 6th European research framework programme (FP6) in priority area of “Nanotechnologyand Nanosciences, Knowledge-based Multifunctional Materials and New Production Processes andDevices” (NMP).

A key objective of the MINAM vision is to identify emerging trends and provide strategic directionsfor future investment in research and development aimed at sustaining and further enhancing theleading positions of the European industry in micro- and nanomanufacturing technologies. Inparticular the MINAM vision addresses the strategic research priorities in four key areas:manufacturing of nanomaterials, processing of nanosurfaces, micromanufacturing processes and thedevelopment of integrated systems and platforms for micro- and nanomanufacturing. In thepreparation of the document, members of µ-Sapient, IPMMAN and 4M worked alongside variousindustrial and voluntary contributors.

One of the key conclusions of both the MINAM SRA and the vision has been that micro- andnanomanufacturing is a highly resource and knowledge intensive sector and capitalising on the latesttechnological developments can only be achieved by a concerted effort of industrial stakeholders,research and academic organisations and public bodies.

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TABLE OF CONTENTS

1 INTRODUCTION 1

2 SOCIAL IMPACT 3

2.1 ENVIRONMENT – USE OF LESS ENERGY AND RAW MATERIALS 3

2.2 WORKPLACES PRESERVATION 4

3 ECONOMIC IMPACT 5

3.1 MICRO- AND NANOMANUFACTURING AS A STRATEGIC INDUSTRIAL SECTOR 5

3.2 SOURCE OF HIGH SKILLED EMPLOYEMENT 5

3.3 INCREASED TECHNOLOGICAL AND INDUSTRIAL COMPETITIVENESS 6

4 MANUFACTURING OF NANOMATERIALS 7

4.1 PROCESSES AND EQUIPMENT FOR ECONOMICAL AND AUTOMATED INDUSTRIAL PRODUCTION AND

FUNCTIONALISATION OF NANOPHASED PARTICLES 8

4.2 PROCESSES AND EQUIPMENT FOR ECONOMICAL AND AUTOMATED INDUSTRIAL PRODUCTION OF BULK

NANO MATERIALS 9

4.3 PRODUCTION ENVIRONMENT FOR NANOPHASED PARTICLES FABRICATION AND FUNCTIONALISATION 10

5 MANUFACTURING OF NANOSURFACES 11

5.1 PROCESSES AND EQUIPMENT FOR HIGH QUALITY NANOSTRUCTURING AND COATING 12

5.2 PROCESSES AND EQUIPMENT FOR HIGH QUALITY SURFACE FUNCTIONALISATION AND NANOLAYERING13

6 MANUFACTURING OF MICROCOMPONENTS 14

6.1 MICROMANUFACTURING PROCESS TECHNOLOGIES 15

6.2 MICROMANUFACTURING PROCESS CHAINS FOR VOLUME PRODUCTION 15

6.3 MICROASSEMBLY PROCESSES FOR MULTI-FUNCTIONAL MULTI-MATERIAL MESO- AND MICRODEVICES16

7 INTEGRATED MICRO- AND NANOMANUFACTURING SYSTEMS AND PLATFORMS 17

7.1 MICRO- AND NANOMANUFACTURING SYSTEMS: DESIGN, MODELLING AND SIMULATION TOOLS. 18

7.2 MICRO- AND NANOMANUFACTURING SYSTEMS: PROCESSES, EQUIPMENT AND TOOLS INTEGRATION 18

7.3 NEW FLEXIBLE, MODULAR AND NETWORKED SYSTEM ARCHITECTURES FOR KNOWLEDGE BASED

MANUFACTURING 19

8 CONCLUSIONS 20

9 REFERENCES 21

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1 INTRODUCTION

It is widely acknowledged that the developments in micro- and nanomanufacturing technologies arestrategically important for maintaining the industrial base of the European Community and allowingthe European industry to play a leading role in the dramatically increasing global market of micro- andnanotechnology based products and services (Figure 1).

The European micro- and nanomanufacturing technology platform MINAM has been created tosupport the European manufacturers and equipment-suppliers in the field of manufacturing micro- andnanotechnology products in establishing and maintaining a worldwide leadership in key technologyareas. The establishment of the MINAM platform has been facilitated by the coordinated actionsprojects µ-Sapient and IPMMAN and the Network of Excellence 4M all funded by the 6th Europeanresearch framework programme (FP6) in priority area of “Nanotechnology and Nanosciences,Knowledge-based Multifunctional Materials and New Production Processes and Devices” (NMP).

Figure 1 - Applications of Micro- and Nanomanufacturing in different market sectors

The NEXUS market analysis for the years 2004-2009 [1] provides a clear indication of the scope ofthe economic sectors that are directly affected by micro- and nanomanufacturing technologies(MNMT) with their current investment trends. Investments are expected to keep on growing rapidlywith the potential of the market reaching 20 billion € in 2010, with a growth rate of around 20% in themicro- and nanotechnology based products.

Europe has an excellent research competence and the required system knowledge to capture a goodpart of this market. However, to reach this objective, there is need within the multi-disciplinary fieldof MNMT for more applied research and development, more focus, more critical mass and a fastertransfer of R&D results and innovation into the market and in products.

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To achieve these goals the targets of the European micro- and nanomanufacturing industry are:

to establish a new industry for the manufacturing of products based on emerging micro- andnanotechnologies

to develop Europe as the leading location for the production of nanoparticles, micro- andnanostructures and components with “micro/nano inside”

to establish the complete value chain leading to the manufacturing of European micro- andnanotechnology products

to ensure that the new micro- and nanoproducts are produced at European facilities usingequipment and systems of European origin thus overcoming the current situation in which onlyR&D, pilot cases and first production lines are set in Europe.

A key objective of the MINAM vision is to identify emerging trends and provide strategic directionsfor future investment in research and development aimed at sustaining and further enhancing theleading positions of the European industry in MNMT. In particular, after an overview of the social andeconomic impact of MNMT, the following four chapters have a structure that matches the internalorganisation of the MINAM Operation Support Group which consists of four expert groups. Thereforethey deal with manufacturing of nanomaterials (section 3), manufacturing of nanosurfaces (section 4),manufacturing of microcomponents (section 5) and integrated micro- and nanomanufacturing systemsand platforms (section 6). In section 7 the conclusions for the Vision document are drawn.

Figure 2 – MINAM Structure

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2 SOCIAL IMPACT

The demands of the 21st century society for solutions of the “grand challenges” for an ever improvingyet affordable health care, higher standards of living and quality consumer goods and the risks posedby increasing energy costs and depleting resources are still unanswered. These topics are drivingforces which increase markets for goods employing innovative systems. MNMT were and still areexpected to make a significant contribution to these big open issues.

2.1 Environment – Use of less energy and raw materials

In the short term, MNMT are unlikely to have a significant impact on the environment or on energycosts. These technologies will lead to higher energy costs in early development stages due to currentprocessing technology. At the same time, advanced micro- and nanofabrication are exciting from theaspect that fewer energy and resources will be consumed once these technologies mature. Forexample, they will lead to scrap reduction and less waste due to the build up process versus removal ofmaterial to obtain the end product [2].

Innovative nanomanufacturing technologies are already being developed to reduce dependence onfossil fuels and consequently reduce the carbon dioxide emissions, as well as reduce the concentrationof nitrogen oxide and sulphur oxide in the atmosphere [3].

Figure 3 – Multifunctional nanocomposite materials applications (Courtesy of CRF)

The list below represents current thoughts on the major areas where nanomanufacturing technologiesmay provide environmental benefit:

Electricity storage - improved efficiency of conventional rechargeable batteries which could beused in transport applications to reduce emissions, or as a ‘backup’ for alternative energy to allow

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very high levels of renewable energy. Nanotechnologies are likely to be employed in developingsuper-capacitors, which provide alternative methods of electricity storage

Thermovoltaics - new nanomaterials which turn waste heat into electricity. This could result insignificant energy savings in any application where combustion is the primary method of energygeneration (e.g. hybrid cars)

Fuel cells - either as part of a sustainable hydrogen economy or as efficient hydrocarbon basedfuel cell, there is potential to reduce vehicular emissions or, as CHP (Combined Heat and Power)plant, reduce heating and electricity generation emissions

Lighting - LEDs offer an energy efficient alternative to conventional incandescent light sources.Nanotechnology is being employed to develop these new light sources.

Engine/fuel efficiency - the use of nanoparticulate fuel additives could reduce fuel consumption indiesel engines and improve local air quality. Micro- and nanomaterials are also being used toimprove the heat resistance of aeroplane turbine blades allowing the engine to run at highertemperatures, which improves the overall engine efficiency.

Weight reduction - novel high strength composite materials could reduce the weight of materials.Future goals include the reduction of vehicles weight through the use of nanotubes in metal alloysand plastics; improved tyres incorporating nanoparticles in the rubber formulas and optimisedcombustion processes in motors thanks to nanotech catalytic converters [4].

2.2 Workplaces preservation

Those same countries that struggle because of the departure of investments to more convenientlocations are the same that have a vast experience in MNMT and have always been a source ofinnovation. At the same time, there is a systematic failure in exploiting this potential to a degree whichwould allow Europe to compete with the rest of the world in economic terms. This is confirmed by thelatest European Innovation Scoreboard published to date. This is an instrument, developed at theinitiative of the European Commission, under the Lisbon Strategy, to evaluate and compare theinnovation performance of the EU member states [5].

Figure 4 – Comparison of innovation performance of EU versus US and Japan [5]

According to this report, EU still lags behind the US and Japan, though the innovation gap isnarrowing, especially with the US. In Figure 4 the vertical axis represents the difference between theSummary Innovation Index of EU members and US and Japan respectively. The Summary InnovationIndex is used to give an “at a glance” overview of aggregate national innovation performance. Thesediagrams give an indication of how much MNMT, being by their own nature innovative, can play akey role in sustaining the European economy and preserve or create workplaces.

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3 ECONOMIC IMPACT

MNMT capabilities are becoming key enablers for gaining or maintaining the lead over competitors inorder to sustain a strong economy and provide an impetus towards meeting societal demands.

3.1 Micro- and nanomanufacturing as a strategic industrial sector

NEXUS – the European Microsystems Association – has analysed Microsystems/MEMS markets forthe years 2004-2009; the report gives a quantification of the economic sectors that are directly affectedby MNMT and what will be the trend in the near future. Overall, this study safely concludes thatMicrosystems (including MST/MEMS) sensors and actuators are consolidating their position inestablished markets and finding new applications, leveraging a combination of advantages rangingfrom low manufacturing costs, compact size, low weight and power consumption, as well as increasedintelligence and multifunctionality. Over the next five years, this market is predicted to grow at a rateof 16% per year from $ 12 billion in 2004 to $ 25 billion in 2009 across a spectrum of 26 MST/MEMSproducts [1].

Figure 5 provides details about these projections highlighting how the different economic sectors willbe affected.

Figure 5 - Microsystems market per segment [1]

3.2 Source of high skilled employment

The Lisbon goal defined by the European Union is a rather ambitious one. By 2010, 3% of the grossdomestic product of each member state shall be invested in research and development for Europe tobecome the most competitive region in the world.

Europe already assumes an outstanding position due to its well-developed technical innovativenessand industrial exploitation of new technologies (micro, nano, opto, bio). While the development and

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innovation capacities in Europe have been rather high so far, there is the risk that young skilled staffwill not be available to a sufficient extent for transferring technical developments to industrial use.

Today, technical development and the industrial need for qualification profiles have been consideredrather rapidly by the academic curricula. Implementation of the Bologna objective accelerated thisprocess in the past years. But it must be noticed – and this is the challenge – that engineers trainedtoday will be the developers of products and processes in about 10 to 15 years time. Consequently,they already today require a training profile that is tailored to future demands. The rapidity oftechnical development, however, raises the question about which strategies are suited for educationand for “learning during lifetime” for the engineers of tomorrow.

As far as technical transfer to practical use is concerned, today’s need is to integrate the employees ofcompanies in a learning process that enables them to reproduce and adequately implement technicaldevelopments in products and processes. Examples are the key skills of MNMT. Employees who aresupposed to implement the latest technical developments in practice require the skill to work preciselyin micro- and nanostructures in clean-room conditions. Understanding the functioning and applicationpotential of new technologies is crucial to the rapid dissemination of excellent technical developmentsin industrial use.

Competent qualification on the development and application levels will also have to take into accountthe increasing convergence e.g. between nanotechnology and microsystems technology. Apart fromthe basic qualification in natural sciences, education will have to focus on specific issues in order tomeet the requirements resulting from this trend.

3.3 Increased technological and industrial competitiveness

MNMT help generating competitiveness among companies and industries. Their developmentimproved the market share of many European companies coming from different areas of applicationsand promoted collaborative research thanks to partnerships between private and public sector. It isimportant to stress that business and academia cooperation plays a major role in increasing companies’strength on the market; this cooperation makes it easier to tackle the issues that can slow downadvances such as the integration of innovation, new methodologies and high level of educationdemanded.

In the last years research institutes and universities around the globe have focused on research inmicro- and nanoscale phenomena, devices, and systems. Although this research has resulted in anadvanced knowledge in micro- and nanomanufacturing, it is evident that the lack of industrialimplementation of this know-how is the key in strengthening the future growth of these technologies.Even though progress has been made in mass production concerning these areas, the main productionenvironment for MNMT remains in the lab. This results in an unfamiliarity of large scale productionenvironments to micro- and nanotechnologies, leading industries to hesitate adapting technologies thatmight import unpredicted factors affecting the performance and quality of the manufacturing chain. Atthis point investing in the development of infrastructure, such as higher modularisation, flexibility andscalability might allow a reduction of production costs and are vital for success of new productionplatforms. This will allow a strong industrial involvement with leading research labs to take micro-and nanoproducts to the next level.

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4 MANUFACTURING OF NANOMATERIALS

Figure 6 illustrates the vision for the manufacturing of nanomaterials and highlights the expecteddevelopment of the corresponding production technology in the upcoming years. The vision is basedon the roadmap “NanoManufacturing” [6].The roadmap is based on development trends identified bymembers of the MINAM working group Nanomanufacturing, a questionnaire developed by experts ofthe same group and distributed by organisations and members, as well as contributions from keyexperts. The questionnaire was published at the end of April 2006 on the website of the working groupNanoManufacturing (www.NanoManufacturing.eu). The access to the questionnaire was public, inorder to get as many inputs as possible. More than 100 useful returns were elaborated and constitutethe main contributor to the roadmap.

Figure 6 – Vision for manufacturing of nanomaterials

According to this document, some technologies are already successfully used for manufacturing andprocessing nanomaterials (e.g. the Sol-Gel-Method, advanced PVD methods, Plasma Synthesis). Onthe other hand, there are many technologies known in the field of applied research, which areforecasted to be ready for industrial application in five to six years (e.g. self-assembly, in-situsynthesis).

The results of the roadmap also highlight that the markets requiring nanomanufacturing are emergingor are already partly in existence. In particular the markets for electronics, energy, aeronautics andspace, automotive and life science/medicine will rely on the developments of nanomanufacturing inthe next years.

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Figure 7 – Expected trends for the manufacturing of nanomaterials

The progress considered necessary in the field of manufacturing of nanomaterials is summarised inFigure 7. In the upcoming years, particular focus should be on the following topics which are analysedin the following chapters:

Processes and equipment for an economical and automated industrial production andfunctionalisation of nanophased particles

Processes and equipment for an economical and automated industrial production of bulknano materials

Production environment for nanophased particles production and functionalisation

4.1 Processes and equipment for economical and automated industrialproduction and functionalisation of nanophased particles

The manufacturing of new nanomaterials with new properties calls for the development of processesand equipment for an industrial production of (functionalised) nanophased particles as a basis forincorporating nanocomposites and other bulk nanomaterials. In addition, special designed nanophasedfunctionalised particles can be the basic material and could be directly used for an instant coating inorder to realise new surfaces.

The target is to industrially manufacture and functionalise nanophased particles of the highestindustrial relevance for the end-user groups in the nanomicromanufacturing value chain.The focus ison the development of industrial production processes for cost efficient, high yield manufacturing ofnanophased particles:

Continuous process from material to production without transport leak Expert database for production parameters Equipment for safe transports of particles Standardised control systems and parameters

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A key issue related to the production of nanomaterials is the collection of nanopowders. The collectionshould be as efficient as possible (high yield of recuperation) and safe. The most promising methodsfor the production of nanopowders are based on batch processes. A huge effort has to be made toswitch to continuous production which is more relevant for industry. At an industrial production scalewith rates of kg/hour the corresponding high volumetric fabrication (m3/h) has to be carefullymanaged. This issue remains the same if the nanopowders collection is implemented in a solvent. Atthe end of the production line, the produced nanopowders have to be stored in a safe way in order tolimit a potential contamination and to avoid an agglomeration which would be harmful to the uniqueproperties of the nanomaterials. A general target is the zero emission of nanopowders during the wholeproduction process.

Research on this topic should clearly demonstrate how nanophased particles can be produced on anindustrial scale making these new materials available in the required quantities at affordable prices.Up-scaling the processes and simultaneously increasing the reproducibility and reliability can beachieved by a higher degree of automation.

The production should be assisted by simulations which support the integration of known technologiesand equipment into existing and novel processes. Moreover quality can be optimised by simulationfrom first development steps with consequent significant reduction in investments.

Therefore, the main development issues and targets are:

1. Nanophased particles production and functionalisation

Processes for production of nanophased particles e.g.:

Colloid chemistry, Sol gel, Hydrothermal chemical methods, Green chemistry Plasma synthesis, PVD, Flame pyrolysis Milling and mechanical alloying

Processes for functionalisation of nanophased particles e.g.:

In-situ synthesis, Grafting, Sol-gel and MW-RF plasma

2. Economical production

High yield, easy implementation and low-cost material Automation: up-scaling, reproducibility and reliability

4.2 Processes and equipment for economical and automated industrialproduction of bulk nano materials

The industrial production of nanocomposites and other bulk nanomaterials, incorporating(functionalised) nanophased particles requires the development of novel processes and equipment.

The focus is on the industrial manufacturing of bulk nanomaterials of the highest industrial relevancefor the end-user groups in the micro- nano- and macromanufacturing value chain. Up-scaled processesand equipment with high yield, easy implementation, and high reproducibility are required.Processesmay include sol-gel, melt compounding, sintering, laser sintering, HlPing, spark plasma sintering,finished products net shaping, finished products rapid manufacturing.

Results from research in this field should clearly demonstrate how bulk nanomaterials can beeconomically produced at an industrial scale, with high yield, easy implementation, low cost materials,reproducibility and upscaling.

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4.3 Production environment for nanophased particles fabrication andfunctionalisation

The manufacturing of new nanomaterials with new properties calls for the development of processesand equipment for an industrial production of (functionalised) nanophased particles as a basis for theincorporation of nanocomposites and other bulk nanomaterials.

The focus is on the production environment: healthcare, safety handling, easy handling, environmentaleffects and safe handling and transport of nanoparticles and integrated quality control methods.Another approach is that of avoiding handling of fine particles and developing products ready forapplications like pastes/inks and components.

Results should provide “easy to use” processes with a full standardisation of nanomaterials andflexible production technologies with a control and quality system for safe processes.

Processes include nanophased particle production, sol-gel, colloid chemistry, hydrothermal chemicalmethods, PVD, PE_CVD, plasma synthesis, flame pyrolysis, self-assembly, electro-deposition,milling, mechanical alloying, mechanochemical production, nanophased particles functionalisation.

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5 MANUFACTURING OF NANOSURFACES

Nanosurfaces are structures containing at least one dimensional feature smaller than 100 nm.Manufacturing of nanosurfaces is relevant for both surface functionalisation (nanolayered thin films)and surface structuring (topographical nanofeatures, nanoclustered coatings).

The roadmap “NanoManufacturing” [6] highlights the development of the manufacturing ofnanosurfaces in the next years. The questionnaire explores the opportunities in nanosurfaces creation.The questions are aimed at gaining information about one of nanosurface’s features which can betopographical, thin-film, modified surface areas or can be a coating (up to the mm size) having phasemodulations or crystal sizes in the mentioned range. Such feature is created on the surfaces of severalsolid materials, e.g. metals, ceramics, glasses, semiconductors, polymers. Figure 8 summarises theresults and findings and illustrates the vision for the manufacturing of nanosurfaces in the upcomingyears.

Figure 8 – Vision for manufacturing of nanosurfaces

Nanosurfaces can be realised by material ablation, material deposition, material modification ormaterial forming. This results in the elaboration of nanosurfaces with new chemical, physical andbiological properties specific to the nanometre scale (e.g. catalytic, magnetic, electronic, optical andantibacterial).

Among the sub-fields of nanoscience, surface engineering has already made the transition fromfundamental science to real world applications in many existing and emerging fields such as materialscience, optics, microelectronics, power engineering, sensor systems and bioengineering. Efforts haveto be made to improve and simplify the production processes so that high quality nanosurfaces can bemanufactured at low costs. Reproducibility, control of the size, shape, homogeneity and robustness ofthe manufactured structures have to be considered as key parameters for industrial use of theprocesses.

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Figure 9 - Expected trends for the manufacturing of nanosurfaces

The vision for the manufacturing of nanosurfaces focuses on:

Processes and equipment for high quality nanostructuring and coating Processes and equipment for high quality surface functionalisation and nanolayering

These topics address the expect trends for the manufacturing of nanosurfaces and are reviewed inmore detail in the following chapters.

5.1 Processes and equipment for high quality nanostructuring and coating

The target is to control and up-scale surface nanostructuring processes with respect to throughput,yield and cost efficiency, developing those processes and equipment most urgently needed in theindustrial production of nanosurfaces thus responding to the priority needs identified in the nano- andmicromanufacturing value chain. The main focus is on increasing the quality/reliability of thestructuring processes supported by the joint development of appropriate measurement equipment. Toreach high quality and reliability a holistic cleanliness system is required including the needed aircleanliness, systematic material design, conception and design of production equipment,,contamination control and quality assurance.

The main development issues and targets are:

1. Higher quality of processes and equipment:

Optimised surface functions and increasing robustness of nanostructured surfaces for abetter performance

Controlling the shape/size and increasing homogeneity of manufactured surfacenanostructures

Increasing the throughput Holistic cleanliness system for the manufacturing of nanosensitive products Processes are e.g. laser based coating, thermal spraying, PVD, PE-CVD, polymer self-

assembly, sol-gel texturation, lithography and etching, moulding and hot embossingimprint

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2. Higher quality through measurement equipment:

Surface characterisation equipments and procedures Online control and online control systems to achieve reproducible and reliable processes

and a high yield Higher resolution Control of the homogeneity of structures

5.2 Processes and equipment for high quality surface functionalisation andnanolayering

There is need for surface functionalisation/nanolayering processes in order to develop new coating-technologies for the production of functionalised surfaces. These processes require a deepunderstanding of the film formation mechanism and the resulting properties of the film. The focus isalso on functional thin films with tailor-made properties and controlled chemical functionalisation(phase segregated polymer blends, block-copolymer films). Nanolayers with sub-micron thickness canbe used to tailor surface properties such as e.g. wettability, nonfouling, optical properties, wearresistance and surface protection.Processes may include: self-assembly, atmospheric pressure plasma, cleaning methods, spin and spraycoating, sputter deposition, electroplating deposition, PVD, PE-CVD, characterisation and in-linequality control with low cost tools and methods.Research results should clearly demonstrate how nanosurfaces can be processed in a high quality byfunctionalisation and nanolayering.

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6 MANUFACTURING OF MICROCOMPONENTS

Microproducts often include either components with overall dimensions and functionalities in themicrometer range or components with microstructured features (from hundreds of micrometers downto hundreds of nanometres).

Enduring challenges are the shaping of 3D components or features as well as selection anddevelopment of processes that meet both functional and economical demands. In high-volumeproduction, mould (pattern) based replication is often most suited, while in small-volume productionenvironment, processes that don’t need product specific tooling are often more economical. A trend isto integrate functionalities such as interconnect and interfaces in components in order to reduce thenumber of parts and/or assembly costs.

Figure 10 highlights the expected development in the field of manufacturing of microcomponents. Itsummarises the results of the coordinated effort of the members of MINAM Operation Support Groupwhich relies on the projects: µ-SAPIENT, 4M and IPMANN. After a review of the state of the art, aquestionnaire was used to gather information and the results discussed with experts and industrialists.

Figure 10 – Vision for microcomponents manufacturing

The range of microfabrication capabilities should expand to encompass a wider range of materials andgeometric forms at ever decreasing dimensions, by defining processes, equipment and tools andtechnologies for process chains that can satisfy the specific functional and technical requirements ofnew emerging single and multi-material products, and ensure compatibility of materials andprocessing technologies throughout the manufacturing chains. The creation of such manufacturingcapabilities should respond to demands for:

Designing products and processes/process chains concurrently to satisfy specificfunctional and technical requirements of new emerging single and multi-material products

Compatibility of materials and processing technologies throughout the manufacturingchains

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Bridging the gap between “mechanical” ultra-precision engineering and “MEMS/IC-based” technologies

Length-scale integration in new products, in particular the integration of meso-, micro-and nanoscale features in new products

New methods and technologies that facilitate function integration in emerging multi-material products

The establishment of new hardware approaches for better manufacturing platforms thatbenefit from vertical and horizontal integration of processes

Providing a basis for a “Design for manufacture knowledge” base to support integratedknowledge approaches

The focus for micromanufacturing for upcoming years should be on:

Micromanufacturing process technologies Micromanufacturing process chains for volume production Microassembly processes for multi-functional multi-material meso- and microdevices

Those topics are analysed in more detail in the following chapters.

6.1 Micromanufacturing process technologies

Microfabrication process capabilities should expand to encompass a wider range of materials andgeometric forms, by defining processes and related process chains that can satisfy the specificfunctional and technical requirements of new emerging multi-material products, and ensurecompatibility of materials and processing technologies throughout the manufacturing chains.

Emphasis should be on developing and characterising high throughput processes for length scaleintegration (micro / nano) and manufacture of components and devices with complex 3D features in asingle material. Example technologies to be investigated either individually or in combination aretechnologies for direct- or rapid manufacturing, energy assisted technologies, microreplicationtechnologies, qualification and inspection methods, functional characterisation methods andintegration of "easy and fast" on-line control systems.

Resulting processes should demonstrate significantly higher production rates, accuracy and enhancedperformance/quality, creating capabilities for serial manufacture of microcomponents and/orminiaturised parts incorporating micro- or nanofeatures in different materials. Processes should alsoprovide higher flexibility and seamless integration into new micro- and nanomanufacture platforms.

6.2 Micromanufacturing process chains for volume production

The objective is to develop process chains that integrate innovative component manufacturingtechnologies and underpin the establishment of manufacturing capabilities for emerging products withhigh potential market impact.

Main development issues include:

Process integration to achieve compatibility of materials and processing technologiesthroughout the manufacturing chains

High throughput micro-manufacturing process chains with build-in capabilities for "easyand fast" on-line inspection, process monitoring and control

Establish “design for manufacture knowledge base” that facilitates a concurrent productand process design and will reduce the product development cycle

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Examples include master making technologies for high throughput microreplication processes such asnanoimprint lithography, reel-to-reel embossing, powder and multi-material injection moulding, 3Dprinting and 3D metallisation that combine the capabilities of MEMS/IC-based and ultra-precisionengineering processes.

The goal is to provide additional tools to increase flexibility, quality and performance, optimising andminimising costs in the micromanufacturing production lines which can be integrated into the newsystems and platforms.

6.3 Microassembly processes for multi-functional multi-material meso- and

microdevices

The emphasis should be on assembly technologies which enable the integration of multi-materialcomponents with complex 3D structures, with in-line packaging and assembly for different physical,chemical, and biological environments.

The main development issues and target areas are:

Automated micro- and nanoassembly, joining and packaging techniques including novel3D solutions

High precision positioning devices, precision tracking and control of applied forces;process monitoring and feedback

Qualification and inspection methods, functional characterisation methods and integrationof "easy and fast" on-line control of assembly systems

Process integration to reduce set-ups and production time, and increase flexibility andmicropart functionality

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7 INTEGRATED MICRO- AND NANOMANUFACTURING SYSTEMS AND

PLATFORMS

The manufacturing of customised products in a cost efficient way, both for high volume and also forsmall and medium lot sizes, will require the development of a new generation of modular, knowledgeintensive, scalable and rapidly deployable systems. They will use the emerging technologies frommicro- and nanoresearch combining them with a very flexible industrial production philosophy.

Figure 11 reports the envisioned in the field integrated micro- and nanomanufacturing systems andplatforms. It summarises the results of the coordinated effort of the members of MINAM OperationSupport Group which relies on the projects: µ-SAPIENT, 4M and IPMANN. After a review of thestate of the art, a questionnaire was used to gather information and the results discussed with expertsand industrialists.

Figure 11 – Vision for micro and nanomanufacturing integrated systems and platforms

Research should aim at developing new reconfigurable and scalable micro- and nanomanufacturingplatforms and systems that can facilitate cost efficient volume manufacture of customised products aswell as small and medium lot sizes. This requires the development of a new generation of modular,knowledge intensive, scalable and rapidly deployable systems. Such systems should utilise theemerging technologies from micro- and nanoresearch, and combine them with a flexible industrialproduction philosophy, production chains easily configurable to downscaling in size or resolution, andupscaling in volume production.

The next generation micro- and nanomanufacturing systems must respond to demands for

A wider variety of highly complex micro- and nanoproducts

Small series production of components with micro- and nanofeatures

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Mapping and storing the whole interdisciplinary knowledge of the product developmentprocess in new design and simulation systems for realizing a knowledge based fabricationin the complete process chain

Ensuring an effective collaboration in distributed manufacturing, for guaranteeingflexibility and adaptability, to support especially the integration of SME in complexmanufacturing networks through new tools for business processes, management andlogistics

Manufacturing systems with a higher level of intelligence and reliability, able toautonomously react and readjust themselves in adverse conditions and to changing processparameters, and pluggable into the complete manufacturing business.

New rapidly deployable and affordable micro- and nanoscale manufacturing systems withreconfigurable and task-specific concepts that would allow for continuous systemevolution and seamless reconfiguration.

The vision for the upcoming years covers the following aspects:

Micro- and nanomanufacturing systems: design, modelling and simulation tools Intelligent, scalable and adaptable micro- and nanomanufacturing systems (processes,

equipment and tools integration) New flexible, modular and networked system architectures for knowledge based

manufacturing

These topics are analysed in more detail in the following chapters.

7.1 Micro- and nanomanufacturing systems: design, modelling and

simulation tools

The objective is to develop new solutions for design, modelling and simulation and to establish acommon understanding of the basics of the different domains in order to facilitate cost efficientvolume manufacture of customised products.The focus is on new micro- and nanomanufacturing system design, modelling and simulation “designfor manufacture knowledge base” rules and tools that will shorten the product development lifecyclethrough rapid process and manufacturing chain definition and implementation into existing industrialprocesses. This includes the mapping and storing of the whole interdisciplinary knowledge of theproduct development process in new system design and simulation systems to realise the fabrication ina complete process chain. Specific tools need to take into account atomic, nano- and microinteractionsand their influence on the production processes of higher resolution micro- and nanofeatures. Thewide spectrum of existing equipment for manufacturing and related information must be convertedinto common solutions through an integrated knowledge-based approach.

7.2 Micro- and nanomanufacturing systems: processes, equipment and

tools integration

Research should focus on the integration of processes, scalable systems and controls with high level ofconfigurability for low to high production volume to allow systems to react rapidly to disruptions.Equipment solutions are required that integrate meso-, micro- and nanoscale fabrication and assemblyprocesses. This will also include new control solutions and embedded sensor technologies forreconfigurable, modular, digital and distributed micro- and nanomanufacturing platforms applicable toa wide range of micro- and nanomanufacturing processes.

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Innovation should include adaptive (self-learning) strategies, level of intelligence and reliability,making the system able to react autonomously to changes in material, environmental properties, toolwear, failures, etc.Moreover, there is need for the development of desktop factories and clean room production solutionsincluding miniaturised "super-clean" portable production environments.

7.3 New flexible, modular and networked system architectures for

knowledge based manufacturing

Research should lead to new rapidly deployable and affordable micro- and nanoscale manufacturingsystems with reconfigurable, flexible, modular, and network interfaced, plug and produce systems,including new solutions for automatic handling of large volumes of miniaturised, micro-, andnanoobjects in transport operations, magazines, feeding, etc.The new equipment and system solutions should allow the integration of different classes of micro-and nanoprocesses such as fabrication, assembly, packaging, inspection into common equipmentplatforms. Results should include new cost-effective high-volume reconfigurable manufacturingplatform for hybrid devices.Integrated, cross-domain approaches are needed in order to support the identification of new solutionsintegrating micro- and nanomanufacturing related knowledge about products and production systemspluggable into the whole manufacturing business. For manufacturing platforms with integratedtechnologies (micro- and nano-, biotechnologies, IT, textile, etc.) horizontal aspects like safety (e.g.health risks when handling with nanoparticles, micro- and nanomarking processes for security andtraceability, etc.) will acquire special relevance for sectorial and cross sectorial applications.

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8 CONCLUSIONS

The developed world is moving rapidly towards a knowledge-based society with the largestcontribution to GDP coming from knowledge-based enterprises. In this context, there is an increasingrequirement for all human endeavours to be assisted by new technology, which itself includes an everhigher 'intelligence' capability and knowledge-content - all confined in ever smaller packages. Microand nanomanufacturing technologies, therefore, are becoming a source of major competitiveadvantage in sectors such as consumer electronics, automotive, healthcare and defence industries.Some of the major challenges facing the European precision manufacturing companies today areincreasing demand for a wider variety of microproducts and an increasingly global and distributedsupply chain. Microproducts are characterised by high complexity and shorter life cycles, whilst thesupply chains and value networks are setting ever more stringent demands.

The MINAM ETP has been established to meet the needs of the European industry by facilitating a farmore focussed and sustainable European-wide infrastructure for coordination of research activities,linking of relevant national and international projects, organisations and initiatives and disseminationand promotion of micro- and nanomanufacturing technologies. One of the key objectives of MINAMvision and strategic research agenda is to facilitate the research and development in MNT at theEuropean level in establishing the technology base for batch-processing a variety of materials that willbecome an integral part of production equipment and manufacturing platforms for the factory of thefuture.

The MINAM vision identifies emerging trends and provides strategic directions for future investmentin research and development aimed at sustaining and further enhancing the leading positions of theEuropean industry in micro- and nano- manufacturing technologies. In particular the MINAM visionaddresses the strategic research priorities in four key areas: manufacturing of nanomaterials,processing of nanosurfaces, micromanufacturing processes and the development of integrated systemsand platforms for micro- and nanomanufacturing.

It is also important to note that micro- and nanomanufacturing is a highly resource and knowledgeintensive sector and capitalising on the latest technological developments can only be achieved by aconcerted effort of industrial stakeholders, research and academic organisations and public bodies.

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9 REFERENCES

[1]. NEXUS Market analysis for MEMS and Microsystems III 2005-2009.[2]. Nacfam, Report on industry views towards: Categories of innovative and potentially

disruptive advanced manufacturing technologies, April 2005,[3]. Hollins O., Environmentally beneficial nanotechnologies, Barriers and Opportunities,

A report for the Department for Environment, Food and Rural Affairs, May 2007,http://www.defra.gov.uk/environment/nanotech/policy/pdf/envbeneficial-report.pdf,

[4]. Federal Office for Public Health and the Federal Office for the Environment,Nanotechnology, Health and the Environment, 2006.

[5]. European Commission, European Innovation Scoreboard 2006, Comparative analysisof innovation performance, http://www.proinno-europe.eu/doc/EIS2006_final.pdf.

[6]. Roadmap Nanomanufacturing,http://www.minamwebportal.eu/downloads/roadmaps/2007-06-25%20-%20Roadmap%20MINAM.pdf.