INSTRUMENTATION
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Nanometrics HL5500PC■
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Nanotronics nSpec■■■■■
C-V ProfilerNanometrics ECVPro■■■
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(FTIR)Nanometrics QS-1200■■■■■■■■
Nanometrics RPMBlue
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Nanometrics Imperia
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Nanometrics Nanospec II
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Tohospec 3100/Tohospec 3100T
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PhysTech DLTS
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Corema
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PhysTech RH2035
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/Tera Evaluator
Quatek RST-100
1
PL 6” ~7 250μm/ Particle
Chip on wafer mapping
1Å75~300mm
120nm2D 3D Mapping
UV 35ÅRobot
2Å75~300mm
Nanometrics2D 3D Mapping
BPSGSiNFSG
2D/3D Mapping
D2W
SiC GaAs GaN
105~1012Ω·cm1mm( )
mapping
Fourier LaplaceI/V C/V
C(T)
IV IIIV
&77K
“ ”
Wafer 2”~8”Wafer / PL
VCSEL DBR200~2600nm≤0.5nm
0.1nm
Particle
III-V GaAs GaN II-VI SiCell Fill/De-bubble/Cell Empty/Sample
CleanWhole Wafer Mapping
RoHs
wafer
50~300mmAFM
1015Ω·cm
1GΩ 500GΩ 1TΩ 5TΩ 50TΩ
Si III-V II-VICIGS
Sample Van Der PauwBar Bridge
0.32T0.1% 25mm ±1%
0.1 0.2 0.40.5T 100GΩ/
90~500K -600°C
10~350K
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Napson RT-70V/RG-5/RG-7/RG-7S/RG-10
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TFT-LCD/CFNapson RT-3000/RS-1300
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Napson Jandel 4-point Probe Head
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300mm Wafer MappingNapson WS-3000
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Napson NC-6800 + TTV
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Napson FLA300/FLA200
Napson EC-80/EC-80P
■■■
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PNNapson PN-12α/PN-50α/PN-1S/PN-8LP
PN-12α
PN-1S
PN-50α
PN-8LP
■
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Napson Cresbox/RT-3000/RG-80N
EC-80P
EC-80EC-80
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MappingNapson NC-80MAP
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/Napson DUORES
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EC-80P
Low:Middle:
0.01~0.5Ω/0.5~10Ω/
High:S/High:
10~1,000Ω/1,000~3,000Ω/
■■■■■
■
Napson PVE-80
ITO (RT-70V/RG-5/RG-7S)
Sheet(RT-70V/RG-5/RG-7)
±0.1%(0.01Ω~1MΩ)±0.2%(NIST )
Ingot RG-10 Ingot
Silicon Wafers Diffused WafersIon-implanted Wafers Epitaxial Layers MetalFilms
2D/3D/ /
( )
2”~8”Φ 156mm
(Sheet Resistance Resistivity)Silicon Wafer Wafer P/N
200mm SMIF 300mm FOUP( )2D/3D Mapping
49 1
TFT-LCD/CF Substrates(ITOMetal Layers n+a-Si Layers)
2880x3080mm
50μ 1m ohm/sq
3 ( [Ohm/Sq][S/cm] [S])
: 5386394
Teflon1mm(0.50 0.635 1.59mm )
12.5~500μm10~200g/
(ITO, TCO ) LOW-E(Carbon Nanotubes)
(Graphenmaterials)0.5~200Ω/sq( )
0.1~4000 Ω/sq ( )
2“~8“/300~80μmSilicon Wafers, GaAs Epi, GaN,
GaP, ITO, Metal Layers
Silicon Wafers, GaAs Epi, GaN, GaP, ITO, Metal Layers, AgNW, Nx2O5, CNT
2”~8”/300~800μmP/N
2”~8”( )
Silicon Wafers, GaAs EPi, GaN, GaP, InP, ITO, Metal Layers
2172D 3D6mmNC-600MAP NC-800MAP
PN(TTV STIR Bow Warp )
Insepction (Microcrack)(Life-time)
PN
PN-12α:1mΩ·cm~20kΩ·cm(Bulk) in ResistivityPN-50α: 0.1Ω·cm~1kΩ·cm(Bulk) in ResistivityPN-1S: 0.01Ω·cm~1kΩ·cm(Bulk)PN-8LP: 0.02Ω·cm~5kΩ·cm(Bulk)LED (P=Red N=Green NG= Yellow)
Si/GaAs/Ge/InP , TTV/BOW/Warp/site and global Flatness
( ASTM )Max.1200 /2-D/3-D MappingWafer size: 3 ~8 inch (Max. 12 inch)
■■■
/Bentham TMC300■
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GaAs /
SW Link RPV
■■■■
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Napson RG-200PV
■■
■■
Napson SRS-2010
contacts
p type SiHighly doped n type
Depletion layer
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Napson DF-9P
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Napson DF-100
■■■
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eDAQ Inphaze (EIS)
■■■■■
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OAI PV&I-V System
■■■
Napson NC-600/NC-700/NC-100PV
■■■■■
■
Napson HF-90R/HF-100DC
PG2000
■
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I-V
NC-100PV
NC-600/NC-700
3
■■■
Napson JPV-100
(Life-Time)Napson HF-300
■■■
Napson CRN-100
1000/ 300mmx300mm
2D/3D ( )1mΩ/ ~1000kΩ/ ( 1mΩ/ ~10MΩ/ )1mΩ·cm~200Ω·cm
15 5
40.001~1000Ω/sq
9Mapping
OK/NG
0.01~1000ohm/sq 9 10
9
109~1015Ω/IGZO
(μ-PCD)
0.1μS~1000μS(0.1~1000Ω·cm )
(75W) (100W)
200~ 2500nm - -
AAA
SLP208mm
- PN - CV I-V -
0.001
10~200ohm/sq
ITO10~1000Ω/
Life-time PN
OK/NG
RS IPIV
>10,000RS100 6
1x1mm2 15x15mm2CPV
(HF90R)(HF-100DC)
/
100μS~5000μS(HF90R) 50μS~20mS(HF-100DC) (10~5000Ω·cm )
JIS
n-type silicon 213~519 cm-3
p-type silicon 214~719 cm-3
1~109ΩASTM
IPCE( / QE)
■■■■■
■
■■
( )0.1nm~250μm
SiNx SiOxNx PSG BPSG ITO a-SiPolysilicon a-c:h DLC Lood PR Polyimide SOG
SCI FilmTek™ SYSTEM12”
0~500μm0~500μm
10nm~350μm40wph(9 )
TSVSCI FilmTek™ 2000M TSV
MicroSense /Bow/Warp/Flatness/TTV
■■■
■■
■
■■■
■■■
APBP
Saw frame
2D 3DTSV
3~12III-V GaAs Ge InP GaN…
Sapphire QuartzGlass SiC SOI …
Stacks of Wafers Wafer on fameTaped Wafer Mounted Wafer
/ TTV Bow WarpBending
*
(2μm )
TE/TM
( )
FilmTek™ 1000
±0.005
10nm~200μm
380~1000
380~1000
√
√(1500)
√
√
√
√
FilmTek™ 4000
±0.00002
3nm-200μm
190-1700
380-1000
√
√(4500)
√
√
√
√
√
√
√
√
√
√
√
FilmTek™ 1500
±0.005
10nm~200μm
380~1000
380~1000
√
√(1500)
√
√
√
√
FilmTek™ 2000
±0.002
5nm~200μm
190~1700
240~1000
√
√(3000)
√
√
√
√
√
√
√
√
√
FilmTek™ 3000
±0.002
5nm~200μm
190~1700
240~1000
√
√(3000)
√
√
√
√
√
√
√
√
√
FilmTek™ 2000SE
±0.0002
1Å-200μm
190-1700
240-1000
√
√(3000)
√
√
√
√
√
√
√
√
√
√
√
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MicroSense UMA-C200L
■
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MicroSense UMA-C200-STR
8” Thickness/TTV/Bow/Warp/SBIR/SFQR
AXX 32% Throughput200,000
AXX(Match correlation)
5400/5500 68 inch 2mm
Open Casstte,SMIF120,000
5
SiC/GaN/Si IGBT/MOFFET/Diode
<35nHmatrix PIM IGBT
IGBT600A/1500V, 2500A200A-1800A/3KV-10KV
■
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LEMSYS IGBT Automatic Test Line/ / /
PRO AC/DC TRds
150-240 /
■■■
■
IGBTLEMSYS PRO AC/DC
IGBTLEMSYS TRd/TRs
IGBT /IEC60747<75nH
1000A-8000A/1500V-4500V14000A300A-10kA/1kV-10kV
■■
■
■
SiC IGBTLEMSYS LAB-AC 0545
SiCdi/dt, du/dt, Eon,
Eoff, Err, Irr, Vth500A
1.2kv, 1.7kv, 3.3kv, 4.5kv200
1ns
■■
■■■■
■
■■■■
LEMSYS TP0620
- 50~2000V- 0.1~10mA- 1~600A/0~10V- 1KV/200mA
LEMSYS DMS
0.1~100A1000V
(trr) 10nS~4μS
CCD0.5μm
UVWafer(6000μm) Wafer(7~10mm)
recipe storage
MEMS
■■■■■
■
■■■■■■
OAI 6000/800
DMS
DMSQRR1A VRR=30V trr:10ns-4μs
DMSQRR15A VRR=30/50/100/200/400V
trr:10ns-4μsIr:0.2-10A
TrrA:10ns-4μsQrrA:1nC-20μC
trr:10ns-4μsIr:0.8-30A
TrrA:10ns-4μsQrrA:1nC-20μC
trr:10ns-4μsIr:0.8-30A
TrrA:10ns-4μsQrrA:1nC-20μC
trr:10ns-4μsIr:2-60A
TrrA:10ns-4μsQrrA:1nC-50μC
DMSQRR50A VRR=30/50/100/200/400V
DMSQRR50A-01 VRR=5/10/15/20/400V
DMSQRR50A-02 VRR=30/50/100/200/400V
trr:10ns-4μsIr:0.8-30A
TrrA:10ns-4μsQrrA:1nC-20μC
trr:10ns-4μsIr:0.8-30A
TrrA:10ns-4μsQrrA:1nC-20μC
trr:10ns-4μsIr:2-60A
TrrA:10ns-4μsQrrA:1nC-50μC
DMSQRR50A-03 IF=1-50AdIF/dt=20-300A/μs
VRR=5/7/15/20/400V
DMSQRR100A VRR=100/200/400/600/1000V
DMSQRR100A-02 IF=20-100AdIF/dt=100-1000A/μs
VRR=20/30/100/400/1000V
N/A
IF=0.1-2AdIF/dt=10-100A/μs
IRR=0.1-1.5A
IF=0.2-15AdIF/dt=10-150A/μs
IF=1-50AdIF/dt=20-300A/μs
IF=1-50AdIF/dt=20-300A/μs
IF=1-50AdIF/dt=20-500A/μs
IF=1-100AdIF/dt=100-1000A/μs
IF=1-50Atr=0.1-3.2μs
tfr:10ns–10μsVfp:0.5–100V
Vf:0–10VDMST-ON50A
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Pegasus PG2000LED
2” 4”LEDLED
1024x768 CCDmw
LED 25k/h
■■■■■■■
MEMS6”~8”MEMS
Agilent LCR meter
chuckDouble Side
Special Desigh GaAs
■■■■■■
Pegasus PG 101W
4”~8”/
LEDLD/PD
/MEMS/ /
■■■■■■■■■
LEDAPS
BC
P7LED
APSL H3C
■■
■
P7
BC
Wentworth S200FA/300FA8”~12“ FA IC Debug
-65°C~300°CRF fA
500x~2000x
CableConnector
CCDLabmaster
■■■■■■
■■
( / )Wentworth M200FA/S200FA-HV
IGBT MOSFET10kV
Kelvin chuck/
InkerTTL RS232 GBIP IGBT
cable Agilent Keithley
■■■■■■■■
DIODE, MOSFET, IGBT
Pegasus FAPG150D
CCD Wafer
2 cassettewafer
■■■■■■
Pegasus 2000D
3”~8”30A
TTL RS232
■■■■■■■
Model M200FA
Model S200FA-HV
GAMMA TIA-3000■■■■■■
7
AR/VRGAMMA GS-1290-NED■
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LEDGAMMA RS-7
Camera
■
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GAMMA GS-1220/1190
LED
Display
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GAMMA GS-1290-DMS/RadOMA-NVISGAMMA GS-1290-DMS■■■■■
6 LCDGAMMA GS-940-7X■■
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/UDTi S470/480/490■
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GAMMA uRAD-FL■
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2D VCSEL (Far Field)GAMMA GS-655CAM
VCSEL
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VCSEL (Near Field & LIV)GAMMA GS-655-NIR■■■■
/GAMMA 191■■
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VCSEL Power supply
Far Tield
Camera system
Conoscopic len
Computer andSoftware
GAMMA RadOMA-NVIS■■■■
MIL-L-85762A MIL-STD-30090.00015cd/m²
380~930nm 380~1100nm
310~1100nm ±0.25nm
0.0005cd/m2 5° 2° 1° 0.5° 0.3° 0.1°
NIST
GS
3D LCDMFT LCD
lm mW/cm2 cd j/m2 lux 10/
200~1750nmCIE f1’<0.8%
4
S480 /211 /
AR380nm~1700nm ( 191Q
200nm~2000nm)
VF VR IR LIVNTC
(Wall Plug Efficiency)
(FwHM/RMS)
LED
RS-10D NISTRS-12D NISTNM-22BPRS-15-XX5000FEL 1000W
GaAs 200~1700nm 10-15watts/ 10-8lux
5ppm/°C0~10V 20mV
NIST
1mm~5mm
MTF
250~1100nm±0.5nm±1%
NIST
CCD/CMOS
34 LED
75mm 97%380~1000nm /
NIST
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Roadvista 922■■■■
■
Roadvista 1000
■■■■■■■
Roadvista StripeMaster II-Touch■■■■■■
Roadvista 1200F
■■■■■■■
Roadvista 932
■
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Roadvista 933■■■■■
Roadvista Laserlux G7■■■■
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Roadvista 940D
: -45°~+45°: 0.2°~+2°
ASTM E1709, EN471, ANSI 107 CIE x,y
32000
0.2°/0.5°ASTM CIE DIN
GPS
4500
ASTM CIE0.2°/0.5°
10~30mASTM CIE DIN
-60°~+60°-180°~+180°
30000
400Android,IOS,windows
USB
TFT-LCD25000
/GPS
ASTM E1710/EN1436 30
/ASTM CIE DIN
10000GPS
TREK 152-1
(CPM)TREK 156A/157/158ATREK 520/523/876/884
■
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TREK 821/820/800 ■
■
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820
800
TREK 901HS■
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■
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/
TREK 541A-1/542A-1
■
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■■
TREK 511/1501
821
156A
157
158A
1
TREK PD04002A■■■■
TREK 344/PD06078( )■■■
MONROE 291■■■■■■
■■
MONROE 287B■
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9
-
-
-
--
-
CAFE
■■■■■■■
Wolfgang METRISO 3000/B530
MONROE 282A/282IS■
■■■■■■■
HOLD 40
Intrinsically safe (IS) meter UL Certification Class I Division 1, Groups A, B, C, D and
Class II, Division 1, Groups E, F, G
0-±55V0.2%
20pF±4pF-60°C~160°C
RH 80%
0~±2kV DC(520 & 876) 0~±20kV DC(523 & 884)
5%( )5~25mm
φ25~175mm
(876/884 )
156A 3 1/2 LED157 158A
± 1V
- / ±1000~±100V( )- /
6” 1”
USB PC(TREK 157/158A)
DI-Water
(10V CDM )(100V CDM )
EMILED
0~±100V DC AC (800) 0~±2kV DC AC (820/821)
±0.1%( )(800/820) ±1%( )(821)
1kHz(821) 5kHz(820) 12kHz(800)LCD
12 LED -
103~1012
-
ANSI/ESD SP3.3
0~2KV/10KV DC Peak AC0.05% 0.2%
CE
- ±1kV DC peak AC(TREK 541A-1)- ±100V DC peak AC(TREK 541A-2)- ±10kV DC peak AC(TREK 542A-1)- ±20kV DC peak AC(TREK 542A-2)
±1% (TREK 541A) ±5% ±0.2% (TREK 542A)LCD
USB
511
L: ±2KV H: ±20KV 5%TREK1501 5
ANSI103Ω ~ 1012Ω 10%
DC 10V 100V 500V1mA≤I≤1.3mA
0~10KΩ 1KΩ~1.2TΩModel850(2.27kg/ 63.5mm)
50000
103~1013Ω103~1012Ω ±5%
1013Ω ±8%6
152P-CR-1 IEC ESDA
152BP-5PANSI/ESD-STM4.1152P-2P
(CAFE) ANSI-ESD SP15.1-2011
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OLED/
ESD
QTI-VM-QSW■■■■
Trek 344/PD06078( )■■■
0~2KV/10KV DC Peak AC0.05% 0.2%
QTI-RM-120/920A■
■■
■
■■
()
750KΩ~35MΩ±5%(<1MΩ )
±10%(≥1MΩ )TCP/IP
1.5s61340-5-1 /
ANSI/ESD S20.20
TREK/WWGOLED
B/S - ±1kV DC peak AC(TREK 541A-1) - ±100V DC peak AC(TREK 541A-2) - ±10kV DC peak AC(TREK 542A-1) - ±20kV DC peak AC(TREK 542A-2)
■
■■
541A ±1% 542A ±5% ±0.2%
/WIFIMES/CIM/PLC
±600~5.5kV0~99.99s
0.001s
ETS 4406■■■■■■
ETS 4431TESD S11.31
+800~+1200V6±2ns(0Ω) <20ns(500Ω)150±15ns(0Ω)
200±20ns(500Ω)
EIA-541 MIL-PRF-81705D
■
■■
■■
0~20/200/2000nC0.01nC
/
■■■■
ETS 230
20nC 200nC0.1nC
■■■■
MONROE 284
Trek 541A/542A/Wolfgang WT5000■■
■
MES/ PC
■■ ■■■ ■
QTI-RM-G1800APP
ANSI S20.20
1%~5%
TET M1200
HBM MM CDM LATCH-UPMIL EIA/JEDEC AEC ESDA
0~±8KV256Pin
CCD
■
■■■
CDMTET CDM-550
D-CDM F-CDM
101024Pins
EIAJ ESDAJEDEC
■■■■
■
ETS 9910PinScan/9910PinPulse±5V~±8KV
HBM (100pF / 1,500Ω): ±5V~±8 KV MIL STD.883E, ANSI/ESDA/JEDEC JS-001MM (200pF / 0Ω ): ±5V~±2KV
ANSI/ESDA S5.2-2012HMM (150pF / 330Ω ): ±5V~±5KV
IEC 61000-4-2PinScan 128Pins
■■
■
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■
ETS 5532
81X36cm36x10cm
■■
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ETS 930D ESD Gun±100V~±26000V ±30000V
/
HBM, IEC, MIL Automotive
■■■■
HMMBARTH 4702 IEC-50
500V~23KV75A PEAK/50Ω
0.7~1.0nSIEC-50
■■■■■■■
HBM TLPBARTH 4003TLP
CDM TLPBARTH 4012 VFTLP+
BARTH 4012 VFTLP+ TLP
I/V100ps
1ns, 2ns, 5ns,10ns( )0~500V 1000V( )0~10A@50Ω 20A( ) 30A( )
■
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TET Ecdm-400E/800E
HBM MM D-CDM F-CDM0~±400V/4000V(Ecdm-400E)
0~±8000V(Ecdm-800E)
1V(400E/800E)1~99
ESDA JEDEC IEC AECWafer Level
ESDTET 7000
HBM MM Latch up MILEIA/JEDEC JEITA AEC ESDA
Pin 1024Pins125°C
■
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TLPESDEMC ES-621
7120A
TLP VFTLP HMM
■■■■
TET M1200
TLPI/V
±1.5%Package ( 48-pin DIP )
Wafer Model 450020~500V 1000V( )0~10A@50Ω 20A( ) 30A( )
11
TREK 950Trek950 0.02 0.5Mpa
10mm ±3V
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0.2μmTeilch Pro 202
200nm~10μm10nm
■■■■■■
CE NIST
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HalTech RPC200
WV-9000
2”~12“■■
EXSEALUrethane
3 1
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EXSEALUrethane
1
■■■■
Wolfgang WarmbierEXSEAL
108Ω/■■
■
EXSEALUrethane
Tray
■
■
ICPEN-VAC® ■■
dust
Dirt
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±5V ( 300mm)1.5 ( 300mm )
1.4~3.2m3/min×30.8~1.0m/s( 300mm )
0~40°C 15~85%566×146×69.5mm(W×H×D)
3100g61dB(A)( 1m)
SSD HDC-AC
■■■■■■■
■■
SSD BF-6MB■■■■■■■■■
SSD CABX
HDC-ACSSD BF-2MA-LV■■■■■
HDC-AC±1V
3S(30mm)
±30V( 300 mm 0.3MPa)0.01~0.5 MPa
5~40°C15%~85%
350~3100×92×29mm(W×H×D)SSD HDC-AC
CABX-HWCABX-LW
HDC-ACSSD BF-X2MC■■■■■
HDC-AC±5V
3S(30mm)
)
SEKISUI Eslon DC Plate
- 106~108Ω/-
- Eslon DC
- Eslon DC PVC PMMA/ PC
-
■
■
■
■
SEKISUI Eslon DC Sheet G /DC Sheet clean
- Sheet G PVC 108~109Ω/- Sheet Clean 1010~1011Ω/
Sheet GSheet Clean
■
■■■
/SEKISUI Eslon DC3D
- 106~108Ω/-
- > 85% > 3%
- PVC /PMMA /PC - -
■
■
■
106~1012Ω
(Outgassing)
(103~1012Ω·cm)
■■■■■■■
Wafer carriersFOUPIC test socketBurn-in socketLCD related parts
■■■■■
Storage traysChip carriersEquipment casesCassettesTweezers
■■■■■
PEEK,LCP,PES,PPS,PBI,PEI,PBT,PC,POM,PMMA,OthersKrefine type A: 1010~1012Ω
Krefine type B: 108~1010Ω Krefine type C: 106~108Ω
500×500×10mm 500×500×12.5mm 500×500×20mm 100×150×5mm
■■
■
■■■■■■
CoosTek Cerastat ESD Safe Ceramic
Surface Resistance Surface Resistance (ohm(ohm )) 1)
Static Decay Time Static Decay Time (1000V to 5V) (1000V to 5V) 2)2)
Residual VoltageResidual Voltageafter Discharge after Discharge (Hot(Hot --spot)spot) 2)2)
Peak Current on Peak Current on ESDESD3)3)
ProperProper RangeRange1) ESD STM 11.112) KUREHA Method3) ESD STM 5.3.1Carbon Fiber Filled Materials
■■■
■■■
13
8ppm 301025ppm 304150ppm 3050V AC/DC 1025VA AC/DC 30AΩ 2 /4 1GΩF 10mFH 10HHz 10MHzRTD/PRT
10nV~1050V 8½ 4PPM
0.1uV~1000V 6½ 0.02%
0.1uV~1000V 6½ 200PPM
1μA~30A 6½ 200PPM
0.1μΩ~1TΩ 8½1Hz~10MHz 7½PRT~200°C~660°C 8½
■■■■■■■■■■
AD/DC /RS232
GPIB/USB
250MHz/350MHz/600MHz
■■■■
TRANSMILLE 3000A
■
■■■
■■■■■
AHI AH 2700A
/ LCRPA
8 7 Transmille 8104/8109■
■
■
■
■
■
/ GPSTRANSMILLE 8700■■■■■
TRANSMILLE 4010/4015■
■■■
■
/Calmet C300B
■■■■■
TRANSMILLE 3200A
■■■■■
TRANSMILLE1000A
TRANSMILLE9000A
■
■
■
1000 3½ 4½
9000
3300
Calmet C200/C233■■■■
IET CS■■■
IET 1693■■■
IET LS■■
Calmet /
/ /
/ /
IET RS■■■
IET HRRS-5kV■■■
IET SRL/SRR/SRC■■
1.5x10-8 tann δ 3x10-7
nanosiemens 1.7x108 gigaohms0.4s 30ms8 / 5
3
±100V
NIST NPL
4000
8ppm/15ppm7
6GHz
U PROCAL4000 USB
- 1TΩ - 0.1Ω
- 0.05Ω 1KΩ - 12KV
560V120A, 360A
0.02% 0.05%
1pF~11111μF0.01%~4%
1μH~11H0.025%~4%
1mΩ~1.9TΩ 10Ω~10TΩ0.01%~1%
12Hz~200kHz0.02%
: 0.00001Ω~99999kΩ
420V20A(100A)45~70Hz0~±90°
1mΩ~10TΩ1ppm~1%
1GHz1GHz
GPS/
3 /2
www.quatek.com.tw
14/ /
INPUTSIGNAL
FEEDBACK S IGNAL
HIGH GAININTEGRATOR
HIGH-VOLTAGESUPPLY
VOLTAGE OUTPUTMONITOR
HIGH-VOLTAGEOUTPUT
HIGH-VOLTAGESUPPLY
OPTO
ISOL
ATIO
N
PRECISION RESISTIVEDIVIDER
OUTPUT STAGES USINGCASCODED MOSFET'S
A
CLASS AB
+
+
POSITIVE
NEGATIVE
s
:i = 4 f (Cload + X pF) Vpeak
:i = (Cload + X pF)2 f Vpeak
:i = (Cload + X pF) dV/dt
Vpeak-to-peakVpeak-to-peak dV
dt
-30 kV
+2 0 mA
+3 0 kV
-20 mA
50Hz 50%
Ipeak = Cload = ( )Cint = *f =
Vpeak-to-peak = dV = dt = dV/dt = /
Trek Model10/10B30/20A20/20C5/80601C50/12610E609E-6609B-3PZD700APZD350A60310/40A
C55pF50pF60pF70pF400pF34pF66pF50pF66pF665pF365pF800pF40pF
int
/Vout max: ±5V~±100VPW: 50~500msTr: 0.2~10nsOffset: 0~±20VPRF max: 50MHzDelay time: 25ns~500ms
Vout max: 200~3000VIout max : 400mA~200APW: 5ns~1msTr: 2~100nsTf: 2~100nsPRF: 0~1MHz
Vout max: 20~100VPW: 0.2ns~1msTr: 0.3~10nsTf: 0.3~10nsPRF: 0~1MHz
Avtech
FID /
Iout max: 0.1~500APW: 0.4ns~DCTr: 0.2ns~2μsTf: 0.2ns~2μsPRF: 0~25MHz
/ /MEMS EBIT
...
FPG-NHFFPG-PHFFPG-PXFPG-NXFPG-NFPG-P
FPG-SP
1KV-50KV0.2KV-50KV1KV-50KV1KV-50KV1KV-1MV
2KV-200KV2KV-10KV
<1-3ns<1ns
<0.1ns>1ns1-2ns
0.1-1ns20-100ps
2-5ns0.2-3ns0.2-3ns2-5ns
1-100ns0.2-3ns0.2-1ns
3KHz-3MHz10KHz-10MHz1KHz-100KHz
10KHz-100KHz1KHz-1MHz
1KHz-300KHz100KHz
Model60/1050/1240/1530/20AP0621NP0621P20/20C20/20C-HSPD0701610/40A10/40A-HS10/10B-HS609B-3610EPD06087 5/805/80-HS609E-6PZD2000A623BPZD700APZD700A M/S601CPZD350APZD350A M/S2100HF603222022102205668B640645646677B615-3615-10PD05034605A
Output Voltage0~+60 kV0~+50 kV0~±40 kV0~±30 kV0~-30 kV0~+30 kV0~±20 kV0~±20kV0 ~ ±10 kV0~±10 kV0~±10kV0~±10 kV0~±10 kV0~±10 kV0 to ±5 kV0~±5 kV0~±5 kV0~±4 kV0~±2 kV0~±2 kV0~±700 V0~±700 V0~±500 V0~±350 V0~+350 V0~+150 V0~±125 V0~±2000 V0~±1000 V0~±500 V0~±3kV0~±2kV0 to ±2kV0 to ±3kV0~±2kV0~±10kV0~±20kV0~±7.5kV0~±1kV
Output Current0~±10 mA0~±12 mA0~±15 mA0~±20 mA0~±20 mA0~±20 mA0~±20 mA0~±60 mA0-±300mA0~±40 mA0~±120 mA0~±40 mA0~±2 mA0~±2 mA0 to ±20 mA0~±80 mA0~±240 mA0~±20 mA0~±400 mA0~±40 mA0~±100 mA0~±200 mA0~±20 mA0~±200 mA0~±400 mA0~±300 mA0~±80 mA0~±20 mA0~±40 mA0~±80 mA0~±5 mA0~±6.5 mA0~±6.5 mA0~±6.5 mA0~±5 mA0~±10 mA0~±35 mA0~±160 mA0~±1 mA
Large Signal Bandwidth0~1.4 kHz(2%Distortion)0~1.4 kHz(2%Distortion)0~1.4 kHz(2%Distortion)0~5kHz(2%Distortion)0~3.5 kHz(1%Distortion)0~3.5 kHz(1%Distortion)0~3.75 kHz(1%Distortion)0~5.2KHz(1%Distortion)0~10kHz(2% Distortion)0~23 kHz(-3dB)0~23 kHz(-3dB)0~19.5 kHz(-3dB)0~400 Hz(1% Distortion )0~600 Hz(1% Distortion )15 kHz (1% Distortion )0~60 kHz(-3dB))0~60 kHz((-3dB))0~6 kHz(1% Distortion )0 ~60 kHz(3% Distortion)0~10 kHz (1% Distortion )0~125kHz (-3dB)0~150 kHz (-3dB)0~8 kHz(1% Distortion)0~250 kHz (-3dB)0~250 kHz (-3dB) 0~2.6 MHz(-3dB)0~150 kHz(5% Distortion)0~75 kHz (-3dB)0~40 kHz (-3dB)0~75 kHz (-3dB)DC0~1.2 kHzN/AN/A0~1.2 kHz0~5 kHz0~10 kHz(1%Distortion) 0~15 kHz(1%Distortion)DC
Slew Rate350V/μs350V/μs350V/μs750V/μs350V/μs350V/μs450V/μs800V/μs1000 V/μs750V/μs900V/μs700V/μs30V/μs20V/μs500 V/μs1000V/μs1000V/μs150V/μs750V/μs300V/μs380V/μs380V/μs50V/μs550V/μs500V/μs2000V/μs100V/μs100V/μs150V/μs150V/μsN/A15V/μsN/AN/A15V/μs80V/μs500V/μs1000V/μsN/A
PZD700-1/PZD700-2 PD07016 610E 2100HF 2200 series 2300 series
15
www.quatek.com.tw
16/PCB
/Dranetz PX-5/PG-4400/PV-440
Dranetz HDPQ Visa
8IEEE 1159 IEC61000-4-30 Class A
EN50160 GB
IEEE 1159IEC 61000-4-30 Class AEN50160 GB
CCD Bent PinPCB SMT
600x900mm 9μm/pixel~25μm/pixel
Offline AOIVista
402 60K 1520x760mm61,440Pin
IC Level 4Clamshell Vista
10K Pin 60Pin
…
(Word )/ .
1MHz .
IEC 61000-4-30 A, IEC 61000-4-7, IEC 61000-4-15, en50160, NVE, IEEE 1159, IEEE1453, IEEE 519, IEEE 1459
- 24 16 0~10V
6 0.2%0.2% 0.5%
0.25~1.0Vrms1.0Vrms
ESR Z
4 USB
LCDIVHuntron Tracker Signature Analysis
DH ProberLabVIEW DUT
Z RFNI PCB
CCD
■■■■■
AC/DC1000Vrms 512
8 4 4IEC61000-4-30 A IEEE1159
- IEC61000-4-7 IEEE519EN 50160 Ed 3
■
■■■■
Dranetz Encore 6100■
■■■■■
■■■
■■■■■
■
■■
PCBHuntron Tracker 2800/2800S
PCBHuntron Tracker 3200S
Huntron Access Series■
■■■■■
■■
AOITESTRONICS 506■
■
■■
Pin ICTTESTRONICS 402 60K
■
■
■■■
AccessDH Prober
Access2 Prober
ADI Smart Tweezers ST5S
PCB
:
Sigma
Radiant Multiferroic/Premier II/Precision LC/RT66B
■■■■■
■■■
■■■■■■■
■■■■
■■■
■■■■■■■
■
■■■
5 LAB PEANUTS
■■
■■
Radiant PNDSAFM
/DIPA 2000i■
■■■■
■■■
■■■
Trek E.F.M. 1100TM
■■■
■
AFMWorkshop NP-AFM
■■■■■■■
LED ELQuatek M2442S-9A
Quatek 5601TSR/QT-50
( )
(=20 )
Multiferroic II Premier II
5KHz @ 10V5KHz @ 30V5KHz @ 100V5KHz @ 200V2KHz @ 500V
RT66CLC II
±100V±200V±500V
2.5MHz 2.5MHz 250kHz
±10V±30V±100V±200V±500V
250KHz @ 10V50KHz @ 30V50KHz @ 100V50KHz @ 200V2KHz @ 500V
270KHz @ 10V270KHz @ 30V270KHz @ 100V100KHz @ 200V5KHz @ 500V
±10V±30V±100V±200V±500V
±4KV/±10KV
<1pA
0.03Hz
PNDS■■■■
>500kHz1 inch* 1 inch0.25 inch
>20μs
■■■■
AFM
PNDS
AFM Chuck
Sample
PZT Actuator
Error Function
Control Signal
Quad Cell Laser
Σ
GPID HVA
Sample
-40
-30
-20
-10
0
10
20
30
40
50
-6 -4 -2 0 2 4 6
Volts
uC/c
m^2
, uA/
cm^2
, uF
/cm
^2
RemanentPolarizationSW CV*10
nSW CV*10
SW IV*2.5
nSW IV*2.5
0.26 micron thick 20/80 PZT with platinum
electrodes.
Cantilever Tip Displacement
-2
0
2
4
6
8
10
12
14
-40 -30 -20 -10 0 10 20 30 40
4/20/804/52/48
Corrected for impedance error.
Displacement in microns.Hysteresis vs Temperature
-60
-40
-20
0
20
40
60
-2000 -1500 -1000 -500 0 500 1000 1500 2000
Temperature (C)
Pola
rizat
ion
(uC
/cm
^2)
30C50C70C90C110C130C150C170C190C
/ CV/ D33
( )
17
D33-
-( )
DLTS
I(V) C(V)
0.1nm/ ±1.5mm
670nm diode, <5mW/ >500kHz
vs vs
PUND vs vs ( )
IV vs vs ±50Oe
( )GPIB RS232
- -175~500°C-
22.9cm(H)x25.4cm(W)x19.1cm(D)91.4cm(H)x91.4cm(W)x91.4cm(D)
0.1~3600μm
2”GaN / VFLED Wafer 9 QC
/ 30 9LED
6ΦLED phase
─
AFM
vibrating non-vibratinglateral force phase
10μm±1KV
0.5 % F.S..
1V2000um square
Static, Line Profile & 3D Mapping
ITO
- 10mΩ~22kΩ- 50mΩ/ ~100kΩ/
±1DC~100nA
0.013nm0.2μc/cm3
10kV( )0.05~1.5mm
PEANUTS
EFM (Electrostatic Force Microscope) Electrophotography MEMC
±200V
5kHz
1/8th Hz
1KHz
10pA
JOVA ISL-4800■
■■
Q/mTrek 212HS-3A■
■■■
Trek 230 TO■■■■■■■
QEA TFS-1000■■■■
idb ID-909■
■■
MIPI SMIA!
www.quatek.com.tw
18/
QEA Personal IAS II■
■■
■
■
QEA MFA-2000L■■■■
QEA Scanner IAS■■■
QEA IAS-1000■■
QEA PDT-2000■■■■■■■■■■
/QEA DRA-2000LL■
■■■■■
250MHz/1 2 4 MIPI(CSI2)960Mbps/SMIA(CCP2) 650Mbps
(DVP DVI HDMI )12 24 -
108~1016Ω·m 10V 8 108~1010Ω 4~10KV 1011~1015Ω
28ml( ) 10-6~10-8Coulombs
3-off 10-7~10-9FSD
/ / / / /
ISO-13660ISO-12233
5μm 33μm
USB PC
Blow-off
/ Q/m
/
-0.19999~0.19999μc0.00001μc
±0.1%( )1~100kPa2~10kPa
USB PC
PIDC
/
Pass/Fail
( ) 308 411493 +886-2-27973357 +886-2-27973957
( ) 96 230271 +886-3-6577776 +886-3-6577779
( ) 60 3 180787+886-7-3855821
http://www.quatek.com.twE-mail:[email protected]
( ) 2025 2112 200235+86-21-64813366+86-21-64813369
( ) 15 C 506100012+86-10-82250468+86-10-82250814
( ) 13 2509518133+86-755-33815218 +86-755-33815099
( ) i 3 1 528710065+86-29-88825124
( ) 610041+86-28-86286355
( )
361001
+86-18559284902
( )
215000
+86-13514913729
( )
241008
+86-18130302962/18956457544
430070
+86-13387286499
http://www.quatek.com.cn
E-mail:[email protected]
V8.19T